System and method for wafer manufacturing process management
US12154808B2 · kind B2 · utility
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20Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 3, 2022 |
| Grant date | Nov 26, 2024 |
| Priority date | — |
| Expiry date | Jan 13, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/31002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor processing system includes a first semiconductor processing site and a second semiconductor processing site. The system includes an unmanned electric vehicle configured to carry a portable cleanroom stocker between the first and second semiconductor processing sites. The portable cleanroom stocker is configured to maintain cleanroom conditions within the portable cleanroom stocker during transportation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.