Device and method for measuring laser displacement
US12158340B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2022 |
| Grant date | Dec 3, 2024 |
| Priority date | — |
| Expiry date | May 20, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are a device and a method for measuring laser displacement. The device comprises an interferometric measurement module, a laser light source module, a signal modulation module, a control processing module and an optical vernier demodulation module. The control processing module controls the signal modulation module to apply a light source modulation signal to the laser light source module, so that the laser light source module provides two laser beams with fixed frequency difference to the interferometric measurement module. The control processing module controls the interferometric measurement module to perform interferometric measurement. During measurement, lasers respectively interfere in two Fabry-Perot cavities in the interferometric measurement module, and are detected by two photodetectors to form main and secondary measurement interference signals. The optical vernier demodulation module demodulates the main and secondary measurement interference signals obtained by the interferometric measurement module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.