Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures
US12160220B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 3, 2021 |
| Grant date | Dec 3, 2024 |
| Priority date | — |
| Expiry date | Feb 19, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonators, filters, and methods. An acoustic resonator includes a substrate, piezoelectric plate, and a diaphragm comprising a portion of the piezoelectric plate spanning a cavity in a substrate. An interdigital transducer (IDT) on a front surface of the piezoelectric plate includes first and second sets of interleaved interdigital transducer (IDT) fingers extending from first and second busbars respectively. The interleaved IDT fingers are on the diaphragm. Overlapping portions of the interleaved IDT fingers define an aperture of the acoustic resonator. A first dielectric strip overlaps the IDT fingers in a first margin of the aperture and extends into a first gap between the first margin and the first busbar. A second dielectric strip overlaps the IDT fingers in a second margin of the aperture and extends into a second gap between the second margin and the second busbar.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.