Acoustic transducer unit, method for manufacturing the same, and acoustic transducer
US12162036B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 2021 |
| Grant date | Dec 10, 2024 |
| Priority date | — |
| Expiry date | Jun 26, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N29/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides an acoustic transducer unit and a manufacturing method thereof, and an acoustic transducer, the acoustic transducer unit includes: a base substrate; a first electrode on the base substrate; a support pattern on a side of the first electrode away from the base substrate, which is enclosed into an accommodation groove, at least one release groove and at least one connection groove, an orthographic projection of the release groove on the base substrate is spaced apart from that of the accommodation groove on the base substrate, the connection groove is between the accommodation groove and the release groove to communicate them; a diaphragm pattern on the side of the first electrode away from the base substrate and capable of vibrating in the accommodation groove; a filling pattern in the release groove; a second electrode on a side of the diaphragm pattern away from the base substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.