System with substrate carrier deterioration detection and repair
US12162134B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2023 |
| Grant date | Dec 10, 2024 |
| Priority date | — |
| Expiry date | Feb 17, 2043 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49771
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.