Detection device and detection method

US12163914B2 · kind B2 · utility

Assignee

• Shanghai Tianma Micro-electronics Co., Ltd. · CN

Inventors

• Kaidi ZHANG · Shanghai, CN
• Baiquan Lin · Shanghai, CN
• Huihui Jiang · Shanghai, CN
• Luning Yang · Shanghai, CN
• Wei Li · Shanghai, CN
• Yunfei Bai · Fremont, US
• Zhenyu JIA · Shanghai, CN
• Kerui Xi · Shanghai, CN
• Feng Qin · Shanghai, CN

Key dates

• Filing date: Feb 28, 2022
• Grant date: Dec 10, 2024
• Expiry date: Jun 4, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/76829
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A detection device and a detection method are provided. The detection device includes at least one detection unit. The detection unit includes a first transistor, a second transistor, a third transistor and a fourth transistor that are electrically connected to each other, a gate is disposed above a channel of each of the first transistor, the second transistor, and the third transistor, and an ion-sensitive membrane is covered above a channel of the fourth transistor. The detection device also includes a first voltage signal terminal, a second voltage signal terminal, and a third voltage signal terminal. Further, the detection device includes a first power supply terminal, a first potential output terminal, a second potential output terminal, and a second power supply terminal.