Semiconductor gas sensor and method for sensing two or more gases using contact resistance and sheet resistance
US12163915B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 23, 2019 |
| Grant date | Dec 10, 2024 |
| Priority date | — |
| Expiry date | Jan 8, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/126
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas sensor system for measuring a plurality of gases in an environment. The gas sensors system comprises multiple gas sensors where each of the gas sensors includes a pair of electrodes separated by a semiconducting material. The gas pairs of electrodes of the gas sensors are separated by different distances in each of the gas sensors. Resistivity of the semiconducting material of the gas sensors changes in the presence of a first gas and a contact resistivity between the electrodes and the semiconducting material of gas sensors changes in the presence of a second gas. From measurements of total resistivity of each of the gas sensors the presence and/or the concentration of both the first and the second gas sensors can be determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.