Patent · US Active

MEMS optical device comprising a lens and an actuator for controlling the curvature of the lens, and related manufacturing process

US12164101B2 · kind B2 · utility

0Cited by

1References

19Claims

0Family size

Assignee

poLight ASA · NO

Inventors

Enri Duqi · Milano, IT
Dario Paci · Vittuone, IT
Lorenzo Baldo · Bareggio, IT
Domenico Giusti · Caponago, IT

Key dates

Filing date	Jul 25, 2023
Grant date	Dec 10, 2024
Priority date	—
Expiry date	Jul 25, 2043

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/047
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A MEMS optical device including: a semiconductor body; a main cavity, which extends within the semiconductor body; a membrane suspended over the main cavity; a piezoelectric actuator, which is mechanically coupled to the membrane and can be electronically controlled so as to deform the membrane; a micro-lens, mechanically coupled to the membrane so as to undergo deformation following the deformation of the membrane; and a rigid optical element, which contacts the micro-lens and is arranged so that the micro-lens is interposed between the rigid optical element and the membrane. The micro-lens and the main cavity are arranged on opposite sides of the membrane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.