Compact line scan MEMS time of flight system with actuated lens
US12164103B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 23, 2021 |
| Grant date | Dec 10, 2024 |
| Priority date | — |
| Expiry date | May 21, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S17/89
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed herein is an optical module including a substrate, with an optical detector, laser emitter, and support structure being carried by the substrate. An optical layer includes a fixed portion carried by the support structure, a movable portion affixed between opposite sides of the fixed portion by a spring structure, and a lens system carried by the movable portion. The movable portion has at least one opening defined therein across which the lens system extends, with at least one supporting portion extending across the at least one opening to support the lens system. The optical layer further includes a MEMS actuator for in-plane movement of the movable portion with respect to the fixed portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.