Patent · US Active

Optical waveguide passivation for moisture protection

US12164150B2 · kind B2 · utility

0Cited by
3References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 12, 2021
Grant dateDec 10, 2024
Priority date—
Expiry dateJul 12, 2041

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B2006/12195
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

In part, in one aspect, the disclosure relates to a method for passivating a waveguide of an optical circuit. The method includes etching a suspended waveguide in the optical circuit; the suspended waveguide having a top surface, a bottom surface, and side surfaces; and covering the top surface and side surfaces of the suspended waveguide with a passivation coating having a thickness that ranges from between about 10 nm to about 20 nm. In one embodiment, the method further includes removing one or more coatings from a portion of the optical circuit. The disclosure also relates to various passivated optical silicon circuit embodiments.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.