Patent · US Active

Image sensor

US12166059B2 · kind B2 · utility

0Cited by
16References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 21, 2022
Grant dateDec 10, 2024
Priority date
Expiry dateJun 8, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F39/8063
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An image sensor comprises a first and second chips. The first chip includes a first semiconductor substrate, a photoelectric conversion layer in the first semiconductor substrate, a color filter, a micro lens, a first transistor adjacent to the photoelectric conversion layer, a first insulating layer, and a first metal layer in the first insulating layer and connected to the first transistor. The second chip includes a second insulating layer, a second semiconductor substrate, a second transistor on the second semiconductor substrate, a second metal layer in the second insulating layer and connected to a gate structure of the second transistor through a gate contact, a landing metal layer below the second metal layer, and a through via in direct contact with the landing metal layer and vertically passing through the second semiconductor substrate. A width of the through via becomes narrower as the width approaches the third surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.