Decoupled transversely-excited film bulk acoustic resonators for high power filters
US12166468B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2021 |
| Grant date | Dec 10, 2024 |
| Priority date | — |
| Expiry date | Nov 1, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate having front and back surfaces, the back surface attached to the substrate. A decoupling dielectric layer is on the front surface of the piezoelectric plate. An interdigital transducer (IDT) is formed over the decoupling dielectric layer such that interleaved fingers of the IDT are over a portion of the piezoelectric plate suspended across a cavity formed in the substrate. A thickness of the interleaved fingers is greater than or equal to 1.17 times a thickness of the piezoelectric plate and less than or equal to 1.7 times the thickness of the piezoelectric plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.