Fixed-fixed membrane for microelectromechanical system microphone
US12170869B2 · kind B2 · utility
0Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2022 |
| Grant date | Dec 17, 2024 |
| Priority date | — |
| Expiry date | Dec 23, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2499/11
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a fixed-fixed membrane for a microelectromechanical system (MEMS) microphone. In one embodiment,
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.