Ultrasound transducer manufacturing method
US12172187B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 2020 |
| Grant date | Dec 24, 2024 |
| Priority date | — |
| Expiry date | Aug 15, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00158
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present disclosure relates to a method of simultaneous manufacturing, from a same substrate (101), at least one first CMUT transducer (I) having a first resonance frequency and at least one second CMUT transducer (II) having a second resonance frequency different from the first frequency, the method comprising the steps of: a) for each transducer (I, II), forming a cavity (103) on the upper surface side of the substrate, and forming a flexible membrane (105) suspended above the cavity (103); b) forming a first layer (109) extending over a portion only of the upper surface of the membrane (105) of the first transducer (I) and which does not extend over the membrane (105) of the second transducer (II); and c) forming a second layer (111) extending over the entire upper surface of the membrane (105) of the first transducer and over the entire upper surface of the membrane of the second transducer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.