Substrate positioning for deposition machine
US12172430B2 · kind B2 · utility
0Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 2023 |
| Grant date | Dec 24, 2024 |
| Priority date | — |
| Expiry date | May 9, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/135
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.