Apparatus and method for exposure of relief precursors
US12174543B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 18, 2021 |
| Grant date | Dec 24, 2024 |
| Priority date | — |
| Expiry date | Aug 18, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/2014
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Apparatus for exposure of a relief precursor includes a substrate layer and at least one photosensitive layer. The apparatus includes a first light source configured to illuminate a first side of the relief precursor, a movable second light source configured to illuminate a second side of the relief precursor opposite the first side, a movable shield located between the first light source and the second light source and configured to capture at least a portion of the light of the second light source transmitted through the relief precursor, and a moving means configured to move the movable shield simultaneously with the second light source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.