Automated operational control of micro-tooling devices
US12176182B2 · kind B2 · utility
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Key dates
| Filing date | Jan 21, 2022 |
| Grant date | Dec 24, 2024 |
| Priority date | — |
| Expiry date | May 4, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micro-tooling device, such as, for example, a scanning electron microscope or a focused-ion beam microscope, provides images. A first machine-learning algorithm and a second machine-learning algorithm are sequentially coupled. The first machine-learning algorithm determines a progress along a predefined workflow based on feature recognition in images associated with the workflow. The second machine-learning algorithm predicts settings of operational parameters of the micro-tooling device in accordance with the progress along the predefined workflow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.