Isolation of waveguide-integrated detectors using a back end of line process
US12176672B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2021 |
| Grant date | Dec 24, 2024 |
| Priority date | — |
| Expiry date | Jun 12, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/1213
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical device includes a substrate, a dielectric layer on the substrate, a waveguide within the dielectric layer, a light sensitive component (e.g., a photodetector) in the dielectric layer and coupled to the waveguide, and a plurality of light isolation structures in at least one of the substrate or the dielectric layer and configured to prevent stray light from reaching the light sensitive component. In some embodiments, a light isolation structure in the plurality of light isolation structures includes two opposing sidewalls and a filling material between the two opposing sidewalls. The two opposing sidewalls include an optical isolation layer. The filling material is characterized by a coefficient of thermal expansion (CTE) matching a CTE of at least one of the substrate or the dielectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.