Metal organic compounds

US12180234B2 · kind B2 · utility

Assignee

• UMICORE AG & CO. KG · DE

Inventors

• Nicholas RAU · Marburg, DE
• Joerg Sundermeyer · Marburg, DE
• Andreas RIVAS NASS · Bensheim, DE
• Ralf Karch · Kleinostheim, DE
• Annika Frey · Hanau, DE
• Angelino Doppiu · Seligenstadt, DE
• Eileen Woerner · Nidderau, DE

Key dates

• Filing date: Jul 26, 2019
• Grant date: Dec 31, 2024
• Expiry date: Feb 10, 2042

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/45553
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The invention relates to the synthesis and provision of a new class of volatile metal organic compounds based on bis(alkylimine)glyoxal and bis(dialkylhydrazone)glyoxal ligands in combination with cyclopentadienide and alkyl ligands for use in ALD and CVD processes.