Patent · US Active

Valve assembly, vacuum assembly and method

US12181075B2 · kind B2 · utility

0Cited by

1References

19Claims

0Family size

Assignee

VON ARDENNE Asset GmbH & Co KG · DE

Inventors

Torsten Dsaak · Dresden, DE
Michael Hofmann · Taufkirchen, DE
Thomas Meyer · Dresden, DE

Key dates

Filing date	Sep 10, 2020
Grant date	Dec 31, 2024
Priority date	—
Expiry date	Apr 26, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67126
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

According to various aspects of the disclosure, a valve assembly for a vacuum chamber housing may have: a valve housing, which has a substrate transfer gap; a valve flap, which is mounted so as to be rotatable about an axis of rotation, thus enabling said flap to be rotated into a first position and into a second position, wherein the axis of rotation is arranged in the substrate transfer gap, and wherein the substrate transfer gap is extended longitudinally along the axis of rotation; wherein the valve flap closes the substrate transfer gap in the first position and is arranged adjacent to the substrate transfer gap in the second position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.