Optical device for heterodyne interferometry
US12181279B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 11, 2020 |
| Grant date | Dec 31, 2024 |
| Priority date | — |
| Expiry date | May 12, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4206
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention refers to an optical device for heterodyne interferometry, comprising a chip, a beam splitter, a first waveguide arranged on the chip, light propagating in the first waveguide being guided to the beam splitter, a second waveguide arranged on the chip, light propagating in the second waveguide being guided to and/or from the beam splitter, wherein the beam splitter, the first waveguide, and the second waveguide form part of a Michelson interferometer, wherein the first waveguide and the second waveguide at least partially form two arms of the Michelson interferometer, and wherein two further arms of the Michelson interferometer are at least partially arranged outside the chip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.