Patent · US Active

Metal-insulator-metal (MIM) energy storage device with layered stack and manufacturing method

US12183520B2 · kind B2 · utility

0Cited by
9References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 13, 2021
Grant dateDec 31, 2024
Priority date
Expiry dateNov 14, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/122
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A MIM energy storage device comprising a bottom electrode; a plurality of electrically conductive vertical nanostructures; a bottom conduction-controlling layer conformally coating each nanostructure in the plurality of electrically conductive vertical nanostructures; and a layered stack of alternating conduction-controlling layers and electrode layers conformally coating the bottom conduction-controlling layer, the layered stack including at least a first odd-numbered electrode layer at a bottom of the layered stack, a first odd-numbered conduction-controlling layer directly on the first odd-numbered electrode layer, and a first even-numbered electrode layer directly on the first odd-numbered conduction-controlling layer. Each even-numbered electrode layer in the layered stack is electrically conductively connected to the bottom electrode; and each odd-numbered electrode layer in the layered stack is electrically conductively connected to any other odd-numbered electrode layer in the layered stack.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.