Cover with a sensor system for a configurable measuring system for a configurable sputtering system
US12183561B2 · kind B2 · utility
0Cited by
9References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2015 |
| Grant date | Dec 31, 2024 |
| Priority date | — |
| Expiry date | Jul 22, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3473
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cover for a configurable measuring system of a configurable sputtering system which is adapted for sputtering multilayer coatings with varying compositions and comprising a plurality of sputtering zones and having a plurality of apertures on which the cover is detachably attachable, and wherein the cover comprises a sensor system for in situ detection of a property of the multilayer coating on a substrate, wherein said at least one sensor system is attached to the cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.