Alignment mask, metal mask assembly, and preparation method therefor
US12183617B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Aug 18, 2020 |
| Grant date | Dec 31, 2024 |
| Priority date | — |
| Expiry date | Jul 21, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3447
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed are an alignment mask, a metal mask assembly, and a preparation method therefor. The alignment mask includes a mask body. The mask body includes: multiple alignment holes; and, separating parts surrounding at least some alignment holes and used for separating the areas at where the at least some alignment holes are located from other areas, where the separation parts include at least one semi-etched line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.