Transversely-excited film bulk acoustic resonator with a cavity having round end zones
US12184261B2 · kind B2 · utility
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63References
15Claims
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Key dates
| Filing date | May 25, 2021 |
| Grant date | Dec 31, 2024 |
| Priority date | — |
| Expiry date | Jul 13, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer is formed on the front surface of the piezoelectric plate with interleaved fingers of the IDT disposed on the diaphragm. At least a portion of a perimeter of the cavity is curved and at least one end zone of the perimeter of the cavity is round.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.