Semiconductor manufacturing apparatus and operating method thereof
US12185450B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2024 |
| Grant date | Dec 31, 2024 |
| Priority date | — |
| Expiry date | Apr 5, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70033
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
Disclosed are semiconductor manufacturing apparatuses and operating methods thereof. The semiconductor manufacturing apparatus includes an oscillation unit that includes a first seed laser, a second seed laser, and a seed module, wherein the first seed laser oscillates a first pulse, and wherein the second seed laser oscillates a second pulse, and an extreme ultraviolet generation unit configured to use the first and second pulses to generate extreme ultraviolet light. The seed module includes a plurality of mirrors configured to allow the first and second pulses to travel along first and second paths, respectively, and a pulse control optical system including a first optical element, a second optical element, and a third optical element. The pulse control optical system is on the second path that does not overlap the first path. The third optical element includes a lens between the first optical element and the second optical element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.