Sensor, method for producting same, and test method and device thereof
US12188829B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 20, 2021 |
| Grant date | Jan 7, 2025 |
| Priority date | — |
| Expiry date | Aug 9, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/123
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor includes: a substrate and at least one infrared temperature measurement unit disposed on the substrate. An infrared temperature measurement sub-unit includes: a first support portion, at least one second support portion, a thermocouple, and an infrared absorption portion. The thermocouple includes a first electrode and a second electrode, each of which includes a first end and a second end; the first ends of the first electrode and the second electrode are connected and disposed on the first support portion; the infrared absorption portion is disposed on the first support portion and covers the first ends of the first electrode and the second electrode; the second ends of the first electrode and the second electrode are not connected and disposed on the second support portion; and in the infrared temperature measurement unit, a cavity structure is included between at least the adjacent first and second support portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.