Method for manufacturing a microbolometer with thermistor material made from vanadium oxide having improved performances
US12188830B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2019 |
| Grant date | Jan 7, 2025 |
| Priority date | — |
| Expiry date | May 1, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/046
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for fabricating a microbolometer includes producing a membrane containing a thermistor material, which is made of a first compound based on vanadium oxide and which is formed from a central segment. The central segment covers an intermediate insulating layer, and the thermistor material is formed from lateral segments, which make contact with biasing electrodes through apertures. The process also includes incorporating locally, by ion implantation, into the lateral segments an amount of an additional chemical element higher than or equal to the effective amount. The electrical resistivity ρL at room temperature of the compound thus modified is lower than or equal to 10% of the electrical resistivity ρc at room temperature of the first compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.