Acoustic wave device
US12191839B2 · kind B2 · utility
1Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 28, 2022 |
| Grant date | Jan 7, 2025 |
| Priority date | — |
| Expiry date | Apr 17, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02834
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic wave device includes a support substrate, a piezoelectric layer, and an IDT electrode. The piezoelectric layer is over the support substrate. The IDT electrode is on the piezoelectric layer, and includes a plurality of electrode fingers. An intersecting width of the plurality of electrode fingers is equal to or smaller than about 5λ.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.