Repeller assembly for mounting into an arc chamber of an ion implanter and arc chamber containing the repeller assembly
US12198890B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2022 |
| Grant date | Jan 14, 2025 |
| Priority date | — |
| Expiry date | Jul 25, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31701
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A repeller assembly mounts in an arc chamber of an ion implanter. The repeller assembly contains a repeller, a tubular insert, first and second insulators, a contact member, and a lock member. The repeller has a knob-shaped body placed on an inner side of the arc chamber opposite to a cathode assembly. A repeller shaft is arranged extending through an opening of a wall of the arc chamber to an outer side. The repeller shaft has a step narrowing down the repeller shaft. The tubular insert is mounted concentrically to the repeller shaft. The first insulator has a collar shape and is attached to the tubular insert so that an inner shoulder of the first insulator is pressed against an outer side of the wall of the arc chamber. The second insulator is cap-nut shaped and is attached to the first insulator with an outer flange thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.