Patent · US Active

Process for fabricating a detecting device the getter of which is better protected

US12199211B2 · kind B2 · utility

0Cited by

1References

16Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Geoffroy Dumont · Paris, FR
Laurent Carle · Maisse, FR
Jean-Jacques Yon · Saint-Égrève, FR

Key dates

Filing date	Nov 19, 2020
Grant date	Jan 14, 2025
Priority date	—
Expiry date	Jan 28, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH10F71/129
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A process for fabricating a detecting device includes producing a getter pad based on amorphous carbon resting on a mineral sacrificial layer that covers a thermal detector and producing a thin encapsulating layer that rests on the mineral sacrificial layer and that covers an upper face and sidewalls of the getter pad. The mineral sacrificial layer is removed via a first chemical etch, and a protective segment of the getter pad is removed via a second chemical etch.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.