Method for manufacturing large-area volume grating via plasma grating direct writing
US12202073B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 17, 2021 |
| Grant date | Jan 21, 2025 |
| Priority date | — |
| Expiry date | Jun 29, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/106
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method for manufacturing a large-area volume grating includes: (1) splitting a laser beam into two or more laser beams, converging the two or more laser beams into a sample at an angle less than 60° to form a first plasma grating; (2) moving the sample in a longitudinal direction of a plane vertical to the first plasma grating to etch out a first prefabricated volume grating; (3) moving the sample laterally to form a second plasma grating, an effective cross section of the first prefabricated volume grating partially overlapping with that of the second plasma grating, then moving the sample in a longitudinal direction of a plane vertical to the second plasma grating to etch out a second prefabricated volume; and (4) repeating steps (2) and (3) n times to obtain a volume grating in any size.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.