Patent · US Active

Process for manufacturing a device for detecting electromagnetic radiation, comprising a getter material

US12203811B2 · kind B2 · utility

0Cited by

2References

14Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Geoffroy Dumont · Paris, FR
Sébastien Becker · Voiron, FR

Key dates

Filing date	Sep 28, 2020
Grant date	Jan 21, 2025
Priority date	—
Expiry date	Oct 23, 2041

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0136
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A process for manufacturing a detection device having at least one thermal detector covered by a mineral sacrificial layer, at least one getter portion covered by a carbon-based sacrificial layer, and a thin encapsulation layer surrounding the thermal detector and the getter portion includes a making a through-opening extending through the mineral sacrificial layer and opening on the substrate. The carbon-based sacrificial layer is deposited so as to cover the getter portion located in the through-opening and to entirely fill the through-opening.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.