Method for operating a mems system, and MEMS system
US12204094B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2020 |
| Grant date | Jan 21, 2025 |
| Priority date | — |
| Expiry date | May 23, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N9/3194
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for operating a MEMS system having a projection unit for providing an image via a light beam, and a deflecting unit for the two-dimensional deflection of the at least one light beam. The method includes: driving the deflecting unit via a reference signal, so that the deflecting unit periodically deflects a light beam at least two-dimensionally, measuring a controlled variable of the deflecting unit that corresponds to an actual position of the deflected light beam, ascertaining a current deviation of the controlled variable from a target variable that corresponds to a target position of the light beam, calculating a compensating variable based on the ascertained deviation, controlling the deflecting unit and/or controlling the projection unit based on the calculated compensating variable for reducing the deviation of the light beam from the target position. The compensating variable is additionally calculated based on an earlier deviation in an earlier period.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.