Patent · US Active

Method for operating a mems system, and MEMS system

US12204094B2 · kind B2 · utility

0Cited by
0References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 11, 2020
Grant dateJan 21, 2025
Priority date
Expiry dateMay 23, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH04N9/3194
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

A method for operating a MEMS system having a projection unit for providing an image via a light beam, and a deflecting unit for the two-dimensional deflection of the at least one light beam. The method includes: driving the deflecting unit via a reference signal, so that the deflecting unit periodically deflects a light beam at least two-dimensionally, measuring a controlled variable of the deflecting unit that corresponds to an actual position of the deflected light beam, ascertaining a current deviation of the controlled variable from a target variable that corresponds to a target position of the light beam, calculating a compensating variable based on the ascertained deviation, controlling the deflecting unit and/or controlling the projection unit based on the calculated compensating variable for reducing the deviation of the light beam from the target position. The compensating variable is additionally calculated based on an earlier deviation in an earlier period.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.