Shared data induced quality control for a chemical mechanical planarization process

US12205061B2 · kind B2 · utility

Assignee

• Versum Materials US, LLC · US

Inventors

• Cesar Clavero · San Jose, US
• Vid Gopal · Sunnyvale, US
• Ryan W. Clarke · Woodbury, US
• Esmeralda Yitamben · Milpitas, US
• Hieu Pham · Milpitas, US
• Anupama Mallikarjunan · San Marcos, US
• Rung-Je Yang · Daxi District, TW
• Shirley Lin · Hsinchu, TW
• Hongjun Zhou · Beijing, CN
• Joseph D. Rose · Gilbert, US
• Krishna P. Murella · Phoenix, US
• Lu Gan · Lo Wu, CN

Key dates

• Filing date: May 18, 2022
• Grant date: Jan 21, 2025
• Expiry date: Apr 1, 2043

Classification

• Technology area (CPC G): Physics
• CPC primary: G06Q50/04
• WIPO field: IT methods for management
• WIPO sector: Electrical engineering

Abstract

A method for developing or improving a process for producing a product from a material comprising steps of acquiring the composition for at least two slurries as raw material data (17) for the CMP based manufacturing process and its relevant parameters (2) by using a Data Collecting computer (9); physically performing specific method steps of a CMP process; measuring relevant parameters of the used slurries and the physically performed CMP process to determine the CMP process performance by using the Data Collecting computer (9); analyzing the measured data about the relevant parameters with a specific software performed on an Analyzing computer (11) by creating for the software and applying with it a predictive model using Machine Learning to understand the intercorrelation of the different parameters and using the results to improve the CMP process performance and the resulting product quality of the CMP based manufacturing process.