Patent · US Active

MEMS and method of manufacturing the same

US12209010B2 · kind B2 · utility

0Cited by

5References

31Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Shanshan GU-STOPPEL · Itzehoe, DE
Malte Florian NIEKIEL · Itzehoe, DE
Thomas Lisec · Itzehoe, DE
Fabian LOFINK · Itzehoe, DE

Key dates

Filing date	Aug 10, 2021
Grant date	Jan 28, 2025
Priority date	—
Expiry date	Sep 29, 2043

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/058
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A MEMS includes a substrate having an element movably suspended relative to the substrate, the element having a first main surface and an opposite second main surface. The MEMS includes a first spring element connected between the substrate and a first column structure connected to the second main surface, and includes a second spring element connected between the substrate and a second column structure connected to the second main surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.