Methods for producing nanoscale patterns, nano-fluidic devices, and nanogap electrochemical devices
US12209016B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | Sep 9, 2020 |
| Grant date | Jan 28, 2025 |
| Priority date | — |
| Expiry date | May 23, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for manufacturing a soft stamp includes providing a substrate having a first electrode and a second electrode, the second electrode being formed at a distance less than 100 nm from the first electrode so that a nanogap Ng is formed between the first and second electrodes; pouring a curable substance over the first and second electrodes and into the nanogap Ng; curing the curable substance to form a soft stamp; and removing the soft stamp from the first and second electrodes. The soft stamp has a nano-feature having a size less than 100 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.