Non-spatial measurement calibration methods and associated systems and devices
US12209953B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 30, 2020 |
| Grant date | Jan 28, 2025 |
| Priority date | — |
| Expiry date | Jul 31, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N17/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for calibrating non-spatial measurements of a device under test (DUT) for misalignment between the DUT and a non-spatial measurement device are disclosed herein. A system for generating a misalignment calibration database can include, for example, a non-spatial measurement device and a high-precision translation stage. The system can generate a misalignment calibration database by taking measurements of a DUT at multiple misalignment locations. A system for measuring a DUT can include, for example, a spatial measurement device, a non-spatial measurement device, a translation stage, and/or a carrier tray. The system can capture measurements of the DUT at a first position and calibrate the measurements for misalignment using calibration data corresponding to the first position. For example, the system can retrieve calibration data from a calibration misalignment system that was taken at the same and/or different locations proximate the position of the DUT.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.