Adsorbate analysis using optically stimulated electron emission
US12209980B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 2019 |
| Grant date | Jan 28, 2025 |
| Priority date | — |
| Expiry date | Apr 17, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/7703
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe for collecting optically stimulated electron emission to inspect chemical reactions of a surface includes a light source to emit light on the surface, a collector, and a controller. The light source emits light on the surface. The collector is configured to detect photoelectrons emitted from the surface in response to the light from the light source impinging on the surface. The collector is further configured to provide a photocurrent based on the detected photoelectrons. The controller includes at least one processor and is operably coupled to the light source and the collector. The controller is configured to cause the light source to emit light on the surface, receive the photocurrent from the collector, and determine at least one chemical reaction of the surface based on the received photocurrent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.