Electrode layer, capacitor and methods for electrode layer and capacitor manufacture
US12211889B2 · kind B2 · utility
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9References
13Claims
0Family size
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Key dates
| Filing date | Aug 13, 2021 |
| Grant date | Jan 28, 2025 |
| Priority date | — |
| Expiry date | Apr 15, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/696
Abstract
The application relates to an electrode layer, a capacitor and methods for electrode layer and capacitor manufacture. The method for electrode layer manufacture comprises the following steps: forming a first electrode layer, the first electrode layer comprising a doped Titanium Nitride (TiN) layer; and forming a second electrode layer on the surface of the first electrode layer, the second electrode layer comprising a TiN layer or a work function layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.