Apparatuses and methods for inspecting embedded features
US12216301B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2022 |
| Grant date | Feb 4, 2025 |
| Priority date | — |
| Expiry date | Aug 1, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/305
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus includes a light source configured to emit light to a translucent material and an embedded feature disposed in the translucent material, a first linear polarizer configured to linearly polarize the emitted light, based on a first orientation of an optical axis of the first linear polarizer, and a second linear polarizer configured to filter the light that is reflected from the translucent material, from the light that is reflected from the embedded feature and the translucent material, based on a second orientation of an optical axis of the second linear polarizer. The apparatus further includes a sensor configured to receive the light reflected from the embedded feature, from which the light reflected from the translucent material is filtered, and capture an image of the embedded feature and the translucent material, based on the received light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.