Surface processing system
US12216739B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Aug 21, 2019 |
| Grant date | Feb 4, 2025 |
| Priority date | — |
| Expiry date | May 8, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An image capturing unit captures an image of a surface of a member treated by a surface treatment unit. A comparison unit obtains a correlation coefficient between a reference image stored in a storage unit and the image captured by the image capturing unit. A cross-correlation coefficient between power spectra of the reference image and the image captured by the image capturing unit is obtained. A control unit stops a surface treatment performed by the surface treatment unit when the correlation coefficient obtained by the comparison unit reaches a set value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.