Method for treating objects and apparatus for carrying out the method
US12217990B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2019 |
| Grant date | Feb 4, 2025 |
| Priority date | — |
| Expiry date | Nov 22, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F71/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a method for treating objects, the objects are transported through a basin by a transporting device. Treatment solution is introduced into the basin by way of at least one feeding device, which is provided with upwardly directed outlet openings. The treatment solution is sprayed upwards by the upwardly directed outlet openings to form jets of treatment solution. The objects are transported through the basin over the upwardly directed outlet openings and a downwardly facing surface of the objects is brought into contact with the jets of treatment solution during the transport of the objects through the basin. There is also described a treatment apparatus for carrying out such a method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.