Method for producing piezoelectric actuator
US12219876B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 4, 2022 |
| Grant date | Feb 4, 2025 |
| Priority date | — |
| Expiry date | Jun 11, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2047
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method for producing a piezoelectric actuator including forming a vibration plate, forming a first electrode on the vibration plate, forming a piezoelectric layer on the first electrode, and forming a second electrode on the piezoelectric layer, wherein the forming the vibration plate has a single layer forming step including forming a metal layer containing zirconium by a gas phase method, and forming a metal oxide layer by firing the metal layer, the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and the metal oxide layer has a thickness less than 200 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.