Metal complexes having triazenido ligands and uses thereof for depositing metals from the gas phase

US12221456B2 · kind B2 · utility

Assignee

• UMICORE AG & CO. KG · DE

Inventors

• Joerg Sundermeyer · Marburg, DE
• Susanne PULZ · Marburg, DE
• Fabian SCHROEDER · Hameln, DE

Key dates

• Filing date: Dec 12, 2018
• Grant date: Feb 11, 2025
• Expiry date: Nov 6, 2041

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/18
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

The invention relates to the use of a metal complex, which has at least one ligand of the formula R1—N3—R2, wherein R1 and R2 are hydrocarbon moieties, for depositing the metal or a compound of the metal from the gas phase. The invention further relates to methods for depositing metals from the metal complexes, and to metal complexes, substituted triazene compounds and to methods for the production thereof.