Vacuum pump with movable trapezoidal seal

US12221961B2 · kind B2 · utility

Assignee

• Pfeiffer Vacuum Technology AG · DE

Inventors

• Jonas BECKER · Lansing, US
• Jan Hofmann · Hamburg, DE
• Sebastian LATTA · Wetzlar, DE
• Heiko Schaefer · Erwitte, DE
• Maik Schaefer · Gernsheim, DE
• Wolfgang Soehngen · Brandoberndorf, DE

Key dates

• Filing date: Dec 19, 2023
• Grant date: Feb 11, 2025
• Expiry date: Dec 19, 2043

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F04C2220/10
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

A vacuum pump in accordance with the invention, in particular a scroll vacuum pump, comprises a first spiral element that has a first wall that extends spirally about a first axis, that extends in an axial direction from a first support, and that has a first free end face facing away from the first support, and a second spiral element that has a second wall that extends spirally about a second axis, that extends in the axial direction from a second support, and that has a second free end face facing away from the second support, wherein the first spiral element and the second spiral element are movable relative to one another and are arranged such that the first wall and the second wall sealingly engage into one another while forming pumping spaces, wherein the free end face of at least one of the walls has a recess, in particular a groove, which extends in a longitudinal direction of the wall and in which at least one seal is movably arranged, and wherein the recess is laterally bounded by at least one inner wall that extends at least sectionally, preferably continuously, obliquely to the axial direction and that is configured to cooperate with a side wall of the seal extending at…