Fully decoupled three-axis MEMS gyroscope
US12222203B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2022 |
| Grant date | Feb 11, 2025 |
| Priority date | — |
| Expiry date | Sep 26, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a fully decoupled MEMS gyroscope, including an anchor point unit, a sensing unit elastically connected to the anchor point unit, and a driving unit configured to drive the sensing unit to move. The anchor point unit includes a center anchor point subunit located at a center of a rectangle and four side anchor points. The driving unit includes four driving members located on four sides of the rectangle. The sensing unit includes two X mass blocks symmetrically arranged in two avoiding intervals, two Y mass blocks symmetrically arranged in the other two avoiding intervals, four Z mass blocks respectively located at an outer side of each driving member, and four Z detection decoupling members respectively located at an outer side of each Z mass block. The X mass blocks and the Y mass blocks are respectively connected to each side anchor point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.