Chip type coil-based fluxgate current sensor
US12222372B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 11, 2020 |
| Grant date | Feb 11, 2025 |
| Priority date | — |
| Expiry date | Nov 4, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R15/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chip type coil-based fluxgate current sensor, comprising: a magnetism gathering iron core, a chip type coil, an integral filtering module, a signal driving module, a voltage acquisition module, and a signal amplification module which are connected in sequence. The chip type coil comprises a first high-resistance silicon wafer and a second high-resistance silicon wafer which are bonded with each other; a built-in cavity is formed between involution surfaces of first high-resistance silicon wafer and second high-resistance silicon wafer, and multiple solenoid cavities filled with coil materials are provided around the periphery of the cavity; a cavity opening is formed at one end after involution of first high-resistance silicon wafer and second high-resistance silicon wafer. The magnetism gathering iron core is inserted into the cavity of the chip type coil by means of the cavity opening. The present current sensor is small in size and stable in signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.