Magnetic-field-assisted plasma coating system
US12224165B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 24, 2023 |
| Grant date | Feb 11, 2025 |
| Priority date | — |
| Expiry date | Apr 13, 2043 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF02F2200/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A magnetic-field-assisted plasma coating system and method are provided. In another aspect, a coating system employs a cathode with a linearly moveable magnetic field. A further aspect employs a workpiece as an anode within which is located an elongated cathode which internally coats a bore of the workpiece. Still another aspect of the present system and method employs an elongated and hollow cathode with at least one magnetic source therein. In yet another aspect, end caps or plates seal against one or more open ends of a workpiece bore to be coated, with a cathode inserted into the bore and a vacuum being created within the bore such that the workpiece itself defines at least a portion of a vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.