Substrate cleaning brush
US12226805B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 2020 |
| Grant date | Feb 18, 2025 |
| Priority date | — |
| Expiry date | Jul 5, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67046
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
In a holder attached state in which a holder upper part 11 is attached to a brush rotation shaft 2, the lower surface of the holder upper part 11 and the inner peripheral surface of a holder lower part 18 define a brush accommodating space 23, and the inner peripheral edge of a holder bottom plate part 19 defines a circular holder opening 24 having a smaller diameter than the inner diameter of the holder lower part 18. A held part 31 of a brush body 30 is in a circular column shape incapable of penetrating through the holder opening 24, and is accommodated and held in the brush accommodating space 23. A cleaning part 32 of the brush body 30 is in a circular column shape smaller in diameter than the held part 31 and capable of penetrating through the holder opening 24, and penetrates through the holder opening 24 and projects downward. A top-to-bottom length L2 of the holder opening 24 of the brush holder 10 is longer than or equal to ¼ of a protruding length L1 of the cleaning part 32 of the brush body 30 from the held part 31 thereof and shorter than the protruding length L1 of the cleaning part 32.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.